Tantalum Sputtering Target
China Super Tech provides a wide selection of purity and shapes of Tantalum sputtering target to meet different requirements of customers.
- Product Introduction
Products Description
China Super Tech provides a wide selection of purity and shapes of Tantalum sputtering target to meet different requirements of customers. Compared to other deposition methods, sputtered films have a better adhesion on the substrate, and materials with very high melting points such as tantalum (melting point 2998°C) can be easily sputtered. Our products are engineered specifically to perform reliably in the deposition process with small average grain size and high purity & density.
Product Parameters
| Material: | RO5200, RO5400, RO5252(Ta-2.5W), RO5255(Ta-10W) |
| Standard: | ASTM B708 |
| Purity: | 3N, 3N5, 4N, with Ta 99.99%min |
| Shape: | Round, Square, Customization |
| Size: | Circular targets: Diameter 15mm up to 400mm x Thickness 3mm up to 28mm Rectangular targets: Thickness 1mm up to 40mm x Width up to 1000mm x Length up to 3000mm |
| Grain Size: | ASTM 4 or finer |
| Flatness: | 0.1mm or 0.15 max |
| Tolerance: | ±0.010mm on all dimensions |
Applications
Sputtering targets are mainly used in electronic and information industries, such as integrated circuits, information storage, liquid crystal display screens, laser memory, electronic control devices,etc. It can also be used in glass coating field and applied to wear resistant materials, high temperature corrosion resistance, high-grade decorative products and other industries.
Why Choose Our Tantalum Sputtering Target?
Strong Adhesion: Ensures a stronger bond between the film and the substrate.
Wide Applicability: Suitable for various high-melting-point materials.
Stable Performance: Small grain size, high purity, high density.
Diverse Selection: Meets the needs of different customers.
FAQ
FAQ
Q: Do Tantalum targets need to be bonded?
A: Yes, they definitely do.
Tantalum targets are often really thin, kind of brittle, or pretty expensive - whether they're flat planar targets or those rotating ones. During sputtering, they can easily crack if they're not supported properly. That's why we bond them to a copper or aluminum backing plate - it prevents cracking and helps dissipate heat much better during the sputtering process. It's like giving them a sturdy foundation to work on!
Q:How long do they last?
A:Targets are considered consumables, and their lifespan depends on sputtering power, cooling efficiency, and target thickness. Proper maintenance of cooling water and ensuring a completely flat cathode face are key to maximizing target lifetime and preventing breakage.
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